synqnet
 
 
  Tech Library: Asyst Spartan EFEM


Asyst Spartan EFEM

 

www.asyst.com



Asyst technologies, Inc. provides automation solutions optimized for the needs of global customers in the semiconductor, flat panel display, and related industries. To continue a leadership role in machine design around the goal of optimum productivity, Asyst did a comprehensive customer and marketing assessment of how the next generation equipment front-end module, or 'EFEM' should perform. Asyst engineers literally started the design process with a blank sheet of paper, and the Spartan™ EFEM was born.

The Spartan EFEM project was to produce the most robust and flexible tool of its kind with a dual role as a general purpose wafer sorter as well. For the critical controls portion of the Spartan EFEM System, Asyst chose SynqNet® technology to ensure that the motion requirements would not only exceed tight performance specification, but offer a clear upgrade path for future innovation. The outcome was a revolutionary tool with highly sophisticated robot control that's changing the market for semiconductor EFEM requirements.

To read the full story, click here (792k)  .

 

 

* Asyst is a registered trademark of Asyst Technologies, Inc. Spartan is a trademark of Asyst Technologies, Inc. All Rights Reserved.